New proposals for cutting-edge processes

The ultimate voidless solution

・High precision and stable application under pressure reduction: Musashi's unique dispense technology enables stable application even in a decompression environment.

・Prevention of mass defects: Equipped with two major functions DVM and AFC specializing in UF cultivated in FAD5100S. Accurately grasp the constantly changing process and prevent the occurrence of defects.

・Propose the application automation line for cutting-edge processes: Total support for various automation lines such as stand-alone, multi-chamber, and inline connecting transport robots.

outline specifications