
High-precision wafer management solution Remapping the results of production and fillet inspection with wafer array compatible software (SECS/GEM compliant)
・ High-speed application by non-stop continuous operation
・ High-speed alignment with non-stop continuous operation: Mu SKY Capture Function
・ Automate the control of the amount of application: DVM function
・ Formation of the application pattern "Leaf Line" ideal for avoiding voids: MCD function [PAT.P]
・ Prevention of mass defects: AFC Function
・Equipped with wafer mapping function
・Full automatic production connected to EFEM is possible.
・Wafer and FOUP support
・Wafer mapping function
・Remapping results (supported with SECSGEM)
Musashi Dispenser outline specifications
Name | Full automatic wafer level dispensing machine FAD5100S-WH |
Model | FAD5100S-WH |
Control method | PC/PLC control (SMEMA compliance) |
Applicable work | 12 wafers, 8 wafers |